Automated alignment in mask‐free photolithography enabled by micro‐LED arrays
نویسندگان
چکیده
We present an automated control system for micro scale positioning, based on single pixel imaging and fluorescence. By projecting a chequerboard array of CMOS controllable μ-LEDs at suitable wavelength, we are able to spatially locate, track automatically align fluorescent markers. Positioning is demonstrated with accuracy the order 20 μm. maskless photo-lithography using capability second μ-LED photo-cure customisable structures in photoresist alignment referenced
منابع مشابه
Reduction photolithography using microlens arrays: applications in gray scale photolithography.
This paper describes the application of reduction photolithography, using arrays of microlenses and gray scale masks, to generate arrays of micropatterns having multilevel and curved features in photoresist. This technique can fabricate, in a single exposure, three-dimensional microstructures (e.g., nonspherical microlens arrays) over areas of approximately 2 x 2 cm2. The simple optical configu...
متن کاملThree Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography
Ordered nanoarchitectures have attracted an intense research interest recently because of their promising device applications. They are always fabricated by self-assembling building blocks such as nanowires, nanodots. This kind of bottom up approaches is limited in poor control over height, lateral resolution, aspect ratio, and patterning. Here, we break these limits and realize 3D sculpturing ...
متن کاملGene expression analysis using oligonucleotide arrays produced by maskless photolithography.
Microarrays containing 195,000 in situ synthesized oligonucleotide features have been created using a benchtop, maskless photolithographic instrument. This instrument, the Maskless Array Synthesizer (MAS), uses a digital light processor (DLP) developed by Texas Instruments. The DLP creates the patterns of UV light used in the light-directed synthesis of oligonucleotides. This digital mask elimi...
متن کاملSequential shrink photolithography for plastic microlens arrays.
Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children's toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed ...
متن کاملEnzyme activity assays within microstructured optical fibers enabled by automated alignment
A fluorescence-based enzyme activity assay has been demonstrated within a small-core microstructured optical fiber (MOF) for the first time. To achieve this, a reflection-based automated alignment system has been developed, which uses feedback and piezoelectric actuators to maintain optical alignment. The auto-alignment system provides optical stability for the time required to perform an activ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Electronics Letters
سال: 2021
ISSN: ['0013-5194', '1350-911X']
DOI: https://doi.org/10.1049/ell2.12244